苏州海芯半导体设备科技有限公司
江苏 苏州 姑苏区劳动路28号华亭大厦2504室                                                                                                               info@adsemtech.cn | www.adsemtech.cn | 2023版权所有                


  • 部件名称:488NM LASER
  • 型号:ADSLA-488P60
  • 替代OEM型号:JDS Uniphase 2214B-30SLQST CONTROLLER & 2214-30SLQTA LASER
  • 适用机台:KLA-TENCOR SURFSCAN 6XXX AIT
  • 技术特点:基于COHERENT公司窄带激光器设计,30MW功率输出,窄带488纳米波长,含功率控制单元及激光器两部分;激光器部分直接安装于原氩离子激光器的柱形桶中,通过控制电缆与功率控制单元通信;全新设计的功率控制单元,内置微处理器;控制接口、电源接口与原OEM电源完全一致,直接替代使用。
  • Based on COHERENT's narrow band laser design, 30MW power output, narrow line width 488nm wavelength. Contains power control unit and laser two parts. The laser part is directly installed in the cylinder barrel of the original argon ion laser and communicates with the power control unit through the control cable. Newly designed power control unit with built-in microprocessor. The control interface and power interface are exactly the same as the original OEM power supply, so it can be used as a direct replacement.