苏州海芯半导体设备科技有限公司
江苏 苏州 姑苏区劳动路28号华亭大厦2504室 info@adsemtech.cn | www.adsemtech.cn | 2023版权所有
- 部件名称：ELECTRON GUN HIGH VOLTAGE POWER (HV Unit)
- 型号：ADSP-HV80+
- 替代OEM型号：原日立CD-SEM机台使用的 567-5101 560-6590 569-6592等型号的电子枪驱动用精密高压电源
- 适用机台：HITACHI CD-SEM S-8820 S-8840 S-9220 S-9260 S-9300 S-9380
- 技术特点：基于高精度高稳定性高压模块设计，输出V1、V2、Vs、V0等共四路高精度直流高压，以及一路高稳定度灯丝恒功率驱动IF；全新设计的多行信息LCD显示面板，所有信息一目了然；独创的高兼容性归一化设计，用户可通过修改设定参数，将该电源直接用于日立型号为S-8820 S-8840 S-9200 S-9260 S-9300 S-9380等所有CD-SEM机台；内置各型号CD-SEM机台V1/V2曲线数据库，自动切换；随机附带电子枪专用高压电缆及插头，长度为2.2米，并可定制；更高的集成度，更低的功耗和重量；与原型号电源相同的通信和控制协议，以及相同的通信、电源及联锁接口，直接替换使用。
- ADSP-HV80+日立CD-SEM机台专用电子枪驱动用精密高压电源软件著作权证书 PDF
- ADSP-HV80+日立CD-SEM机台专用电子枪驱动用精密高压电源使用手册 PDF
- 我们也为客户提供日立原厂高压电源HVPS的翻新维修服务，已累计成功维修翻新近30套。
- Based on high-precision and high-stability high-voltage module design, it outputs a total of four high-precision DC high-voltage channels such as V1, V2, Vs, V0, and one channel of high-stability filament constant power drive IF. Newly-designed multi-line information LCD display panel makes all the information clear at a glance. Unique high-compatibility normalized design, users can modify the setup parameters, the power supply can be used directly for Hitachi model S-8820 S-8840 S-9200 S-9260 S-9300 S-9380 all CD-SEM machine. Built-in V1/V2 curve database of each model CD-SEM machine, automatic switching. High-voltage cables and plugs for electron gun are included with the machine, the length is 2.2 meters and can be customized. Higher integration, lower power consumption and weight. Same communication and control protocols as the original OEM model power supply, same communication, power and interlock interfaces, directly used to replace original Hitachi electron gun high voltage power with model 567-5101, 560-6590, 569-6592.